Oxygen Elimination Effect in Silicon Thin Film by Neutral Beam Assisted CVD System at Room Temperature

제목
Oxygen Elimination Effect in Silicon Thin Film by Neutral Beam Assisted CVD System at Room Temperature
저자
Hong MunPyo
발행일
2010-06-24
학회명
35th IEEE (PHOTOVOLTAIC SPECIALISTS CONFERENCE)
개최지
Honolulu, Hawaii, USA
개최국가
미국
학회 개최일
2010-06-20 ~ 2010-06-25