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Effect of PECVD Radio Frequency on the properties of SiNx:H films for solar cell application

  • Donghwan KIM
제목
Effect of PECVD Radio Frequency on the properties of SiNx:H films for solar cell application
저자
Donghwan KIM
발행일
2012-07-06
학회명
ICMAP
개최국가
대한민국
학회 개최일
2012-07-04 ~ 2012-07-06

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