Epitaxial lateral overgrowth of GaN on sapphire substrates using carbonized photoresist mask

Epitaxial lateral overgrowth of GaN on sapphire substrates using carbonized photoresist mask
제목
Epitaxial lateral overgrowth of GaN on sapphire substrates using carbonized photoresist mask
제목 (타언어)
Epitaxial lateral overgrowth of GaN on sapphire substrates using carbonized photoresist mask
저자
BYUN, Dong Jin
발행일
2011-09-21
학회명
IUMRS-ICA 2011
개최국가
대만
학회 개최일
2011-09-19 ~ 2011-09-22