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Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect
Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect
- 제목
- Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect
- 제목 (타언어)
- Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect
- 저자
- Kang Yoon Mook
- 발행일
- 2018-06-14
- 학회명
- WCPEC-7
- 개최국가
- 미국
- 학회 개최일
- 2018-06-10 ~ 2018-06-15