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Fabrication of nano-porous structure on Si substrate using nanoimprint lithography with AAO template
- 제목
- Fabrication of nano-porous structure on Si substrate using nanoimprint lithography with AAO template
- 저자
- Lee, Heon
- 학회명
- 2006 MNC
- 개최지
- Japan
- 학회 개최일
- 2006-10-25 ~ 2006-10-27