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Electrical Characteristics of Silicon Nitride Film Stress in Passivation Process of AlGaN/GaN Heterojunction Field-Effect Transistors on Silicon Substrate

PARK, JUNG HO

제목: Electrical Characteristics of Silicon Nitride Film Stress in Passivation Process of AlGaN/GaN Heterojunction Field-Effect Transistors on Silicon Substrate

저자: PARK, JUNG HO

학회명: 8th International Conference on Nitride Semiconductors

개최지: 제주

개최국가: 대한민국

학회 개최일: 2009-10-18 ~ 2009-10-23