Electrical properties of Cr-doped SrTiO3 films as a switch material in ReCTF devices

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초록

The electrical properties of Cr-SrTiO3 films deposited on p-Si(100) substrates are investigated for application to a new type of charge-trap flash memory, named ReCTF (ReRAM + CTF). The Cr-SrTiO3 film used as a switch in a ReCTF device has a complete cubic perovskite structure with a (200) crystallographic orientation. By means of current-voltage (I-V) and capacitance-voltage (C-V) analyses, we found that it exhibited electric-field-induced threshold switching characteristics and there were no trapping effects. In this study, we investigated how the retention characteristics of the ReCTF device can be improved without any special processes by applying an optimized Cr-SrTiO3 film. (C) 2012 Elsevier B.V. All rights reserved.

키워드

ReCTFCTFReRAMC-VI-VNVMsMETAL-INSULATOR-TRANSITIONTHIN-FILMSOPTICAL-PROPERTIESMEMORYTRAP
제목
Electrical properties of Cr-doped SrTiO3 films as a switch material in ReCTF devices
저자
Seo, YujeongSong, MinyeongAn, Ho-MyoungKim, Hee-DongKim, Tae GeunSung, Yun-MoKim, Yeon Soo
DOI
10.1016/j.mee.2012.07.082
발행일
2012-10
유형
Article
저널명
Microelectronic Engineering
98
페이지
321 ~ 324