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Characteristics of ZnO:Al thin films prepared by RF magnetron sputtering in H2/Ar atmosphere

  • Donghwan KIM
제목
Characteristics of ZnO:Al thin films prepared by RF magnetron sputtering in H2/Ar atmosphere
저자
Donghwan KIM
학회명
The 9th Joint Symposium on Electronic Materials
학회 개최일
2006-08-21 ~ 2006-08-23

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