Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Kang, Y. J.; Ghong, T. H.; Jung, Y. W.; Byun, J. S.; Kim, S.; Kim, Y. D.; Seong, T. -G.; Cho, K. -H.; Nahm, S.

doi:10.1016/j.tsf.2010.01.053

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Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Kang, Y. J.;
Ghong, T. H.;
Jung, Y. W.;
Byun, J. S.;
Kim, S.;
외 4명

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초록

We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70 degrees. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing. (C) 2010 Elsevier B.V. All rights reserved.

키워드

Ellipsometry; Busmuth neobate; Optical property; MIM CAPACITOR APPLICATIONS; ELECTRICAL-PROPERTIES; DIELECTRICS; SUBSTRATE; HFO2

제목: Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

저자: Kang, Y. J.; Ghong, T. H.; Jung, Y. W.; Byun, J. S.; Kim, S.; Kim, Y. D.; Seong, T. -G.; Cho, K. -H.; Nahm, S.

DOI: 10.1016/j.tsf.2010.01.053

발행일: 2010-09-01

유형: Article; Proceedings Paper

저널명: Thin Solid Films

권: 518

호: 22

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