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Oxygen influence on etching reaction of silicon(111)-H surface in 40% NH4F solution

  • Chi-Woo Lee
제목
Oxygen influence on etching reaction of silicon(111)-H surface in 40% NH4F solution
저자
Chi-Woo Lee
학회명
The 56th Annual Meeting of the International Society of Electrochemistry
개최지
부산 Bexco
학회 개최일
2005-09-25 ~ 2005-09-30

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