Control of dislocation density of GaN used Epitaxial Lateral Overgrowth with carbonized PR mask

Control of dislocation density of GaN used Epitaxial Lateral Overgrowth with carbonized PR mask
제목
Control of dislocation density of GaN used Epitaxial Lateral Overgrowth with carbonized PR mask
제목 (타언어)
Control of dislocation density of GaN used Epitaxial Lateral Overgrowth with carbonized PR mask
저자
BYUN, Dong Jin
발행일
2013-07-03
학회명
The 16th International Symposium on the Physics of Semiconductors and Applications
개최국가
대한민국
학회 개최일
2013-07-02 ~ 2013-07-05