An assembly and interconnection technology for micromechanical structures using a anisotropic conductive film

제목
An assembly and interconnection technology for micromechanical structures using a anisotropic conductive film
저자
Ju, Byeongkwon
학회명
SPIE 1996 Symp. Micromachining and Microfabrication
학회 개최일
1996-10-10 ~ 1996-10-10