LTCC 를 이용한 SnO2 가스 센서

초록

Sensor element array for combinatorial solution deposition research was fabricated using LTCC(Low Temperature Co-fired Ceramics). Designed LTCC was co-fired at 800℃ for 1 hour after lamination at 70℃ under 3000 psi for 30 minutes. SnO₂sol was prepared by hydrothermal method at 200℃ for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and ammonia solution was added to Teflon jar. 20 droplets of SnO₂sol was deposited on the LTCC sensor element and heat treated at 600℃ for 5 hours. The gas sensitivity(S=Ra/Rg) of SnO₂sensor and 0.04wt% Pd added SnO₂sensor were measured. 0.04wt% Pd added SnO₂sensor shows higher sensitivity(S=8.1) than SnO2 sensor(S=5.95) to 200ppm CH₃COCH₃at 400℃

키워드