Reactive ion (N2+) beam treatment of sapphire for GaN deposition

제목
Reactive ion (N2+) beam treatment of sapphire for GaN deposition
저자
BYUN, Dong Jin
학회명
Proceedings of The Second International Conference on Nitride Semiconductors
개최지
Tokushima, Japan
학회 개최일
1997-10-27 ~ 1997-10-31