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Characteristics of Uniform Nano-Porous Silicon Etched in HF-Ethanol and HF-Acetonitrile

  • HONG, Suk In
제목
Characteristics of Uniform Nano-Porous Silicon Etched in HF-Ethanol and HF-Acetonitrile
저자
HONG, Suk In
학회명
The 11th Seoul International Symposium on the Physics of Semiconductors and Applications(ISPSA2002)
개최지
The 11th Seoul International Symposium on the Physics of Semiconductors and Applications(ISPSA2002)
학회 개최일
2002-07-11

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