Effect of Sputtered AlN Buffer Layer for GaN by MOCVD on Patterned Sapphire Substrate

Effect of Sputtered AlN Buffer Layer for GaN by MOCVD on Patterned Sapphire Substrate
제목
Effect of Sputtered AlN Buffer Layer for GaN by MOCVD on Patterned Sapphire Substrate
제목 (타언어)
Effect of Sputtered AlN Buffer Layer for GaN by MOCVD on Patterned Sapphire Substrate
저자
BYUN, Dong Jin
발행일
2015-10-29
학회명
14th International Union of Materials Research Societies-International Conference on Advanced Materials
개최국가
대한민국
학회 개최일
2015-10-25 ~ 2015-10-29