Fabrication of 100nm sized patterns on non-planar substrate using nanoimprinting lithography

제목
Fabrication of 100nm sized patterns on non-planar substrate using nanoimprinting lithography
저자
Huh, Joo Youl
학회명
China International Conference on Nanoscience & Technology
개최지
Beijing, China
학회 개최일
2005-06-09 ~ 2005-06-11