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Fabrication of 100nm sized patterns on non-planar substrate using nanoimprinting lithography
- 제목
- Fabrication of 100nm sized patterns on non-planar substrate using nanoimprinting lithography
- 저자
- Huh, Joo Youl
- 학회명
- China International Conference on Nanoscience & Technology
- 개최지
- Beijing, China
- 학회 개최일
- 2005-06-09 ~ 2005-06-11