EL-MoM2 Effect of Ta2O5 and Al2O3 Buffer Insulators on Electrical Characteristics of Pt/SrBi2Ta2O9/Si Gate Structure

  • CHOI, In-Hoon
제목
EL-MoM2 Effect of Ta2O5 and Al2O3 Buffer Insulators on Electrical Characteristics of Pt/SrBi2Ta2O9/Si Gate Structure
저자
CHOI, In-Hoon
학회명
IUVSTA 15 th International Vacuum Congress, AVS 48th International Symposium, 11th International Con
개최지
IUVSTA 15 th International Vacuum Congress, AVS 48th International Symposium, 11th International Con
학회 개최일
2001-10-28