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Memory Characteristics of MOS Capacitors Embedded with Ge Nanocrystals in HfO2 Layers by ion implantation

  • CHO, Kyoungah
제목
Memory Characteristics of MOS Capacitors Embedded with Ge Nanocrystals in HfO2 Layers by ion implantation
저자
CHO, Kyoungah
발행일
2006-11-01
학회명
2

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