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Electrostatically vacuum sealed tunneling magnetic field sensors

  • PARK, JUNG HO
제목
Electrostatically vacuum sealed tunneling magnetic field sensors
저자
PARK, JUNG HO
학회명
SPIE'00 Symposium on MEMS 2000
개최지
SPIE'00 Symposium on MEMS 2000
학회 개최일
2000-12-13

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