A fabrication technique of top-gate nanowire FETs by a photolithography process

제목
A fabrication technique of top-gate nanowire FETs by a photolithography process
저자
Kim, Sangsig
학회명
Mirco- and Nano- Engineering 2006, 32nd International conference
개최지
Barcelona
개최국가
스페인
학회 개최일
2006-09-17 ~ 2006-09-20