Improved Dc Characteristics of AlGaN/GaN HEMTs with Ti/Al/Ti/Ni/Au Electrode Schemes

  • Lee, Young Su
  • Choi, Hong Goo
  • Hahn, Cheol-Koo
  • Kim, Su Jin
  • Kim, Tae Geun
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초록

We report on the electrical properties of AlGaN/GaN high-electron-mobility transistors (HEMTs) fabricated with Ti/Al/Ti/Ni/Au multilayer ohmic electrodes on Si substrates. The specific contact resistance of the proposed electrode is as low as 8.8 x 10(-7) Omega cm(2), 5.7 times lower than that of the conventional Ti/Al/Ni/Au electrode. AlGaN/GaN HEMTs with Ti/Al/Ti/Ni/Au ohmic electrodes show a high extrinsic transconductance of 104 mS/mm and a maximum current density of 346 mA/mm, which values are increased by 15.5% and 54%, respectively, as compared to those observed from the AlGaN/GaN HEMTs with Ti/Al/Ni/Au ohmic electrodes.

키워드

ImprovementHEMTsTi/Al/Ti/Ni/AuOhmic contactDC performanceOHMIC CONTACTSN-GANF(MAX)
제목
Improved Dc Characteristics of AlGaN/GaN HEMTs with Ti/Al/Ti/Ni/Au Electrode Schemes
저자
Lee, Young SuChoi, Hong GooHahn, Cheol-KooKim, Su JinKim, Tae Geun
DOI
10.1938/jkps.56.1287
발행일
2010-04
유형
Article; Proceedings Paper
저널명
Journal of the Korean Physical Society
56
4
페이지
1287 ~ 1290