Low temperature growth of GaN on α-Al2O3 and Si substrate using an atomic nitrogen source based on dielectric barrier discharge

제목
Low temperature growth of GaN on α-Al2O3 and Si substrate using an atomic nitrogen source based on dielectric barrier discharge
저자
BYUN, Dong Jin
학회명
Abstracts of The Third International Conference on Nitride Semiconductors
개최지
Montpellier, France
학회 개최일
1999-07-04 ~ 1999-07-09