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Development of High Performance Indium Tin Oxide Films at Room Temperature by Plasma-Damage Free Neutral Beam Sputtering System
- 제목
- Development of High Performance Indium Tin Oxide Films at Room Temperature by Plasma-Damage Free Neutral Beam Sputtering System
- 저자
- Hong MunPyo
- 학회명
- International Meeting on Information Display (IMID) 2007
- 개최지
- 대구
- 개최국가
- 대한민국
- 학회 개최일
- 2007-08-26 ~ 2007-08-31