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Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors

  • PARK, JUNG HO
제목
Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors
저자
PARK, JUNG HO
학회명
Proceedings of the international sensors conference 2001
개최지
Proceedings of the international sensors conference 2001
학회 개최일
2001-10-11

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