A Study on the Characteristics of MOS Structure using HfO2 as High-k Gate Dielectric Film

  • Sung, Man Young
제목
A Study on the Characteristics of MOS Structure using HfO2 as High-k Gate Dielectric Film
저자
Sung, Man Young
학회명
Proceeding of KIEEME Annual Autumn Conference 2002
개최지
Proceeding of KIEEME Annual Autumn Conference 2002
학회 개최일
2002-11-08