ScholarWorks@고려대학교

상세 보기

Influence of Plasma-Etch Damage on the Interface States in Silicon-on-Insulator (SOI) Structures Investigated by Capacitance-Voltage (C-V) Measurements and Simulation

Moon Byung-Moo

제목: Influence of Plasma-Etch Damage on the Interface States in Silicon-on-Insulator (SOI) Structures Investigated by Capacitance-Voltage (C-V) Measurements and Simulation

저자: Moon Byung-Moo

학회명: The 4th International Conference on Technological Advanced of Thin Films & Surface Coatings

학회 개최일: 2008-07-13 ~ 2008-07-16