Effects of Process Parameters on the Adhesion of Copper Film on Polyethylene Terephthalate(PET) Substrate Prepared by ECRMOCVD Coupled with a Periodic

제목
Effects of Process Parameters on the Adhesion of Copper Film on Polyethylene Terephthalate(PET) Substrate Prepared by ECRMOCVD Coupled with a Periodic
저자
BYUN, Dong Jin
학회명
2003 MRS Fall Meeting Proceedings
학회 개최일
2003-11-07 ~ 2003-11-08