Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization

Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
제목
Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
제목 (타언어)
Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
저자
BYUN, Dong Jin
발행일
2017-08-25
학회명
Japan-Korea Materials Science Technology 2017
개최국가
일본
학회 개최일
2017-08-24 ~ 2017-08-26