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Optical Diffraction-based Convolution for Semiconductor Mask Optimization
Optical Diffraction-based Convolution for Semiconductor Mask Optimization
- 제목
- Optical Diffraction-based Convolution for Semiconductor Mask Optimization
- 제목 (타언어)
- Optical Diffraction-based Convolution for Semiconductor Mask Optimization
- 저자
- Tae-Eui Kam
- 발행일
- 2025-12-07
- 학회명
- The 39th Annual Conference on Neural Information Processing Systems workshop
- 개최국가
- 미국
- 학회 개최일
- 2025-12-02 ~ 2025-12-07