Formation of electrically active defects in Cz and Fz silicon wafers by 3 MeV proton irradiation

제목
Formation of electrically active defects in Cz and Fz silicon wafers by 3 MeV proton irradiation
저자
Huh, Joo Youl
학회명
Materials Research Society
개최국가
미국
학회 개최일
2000-11-27 ~ 2000-12-01