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Formation of electrically active defects in Cz and Fz silicon wafers by 3 MeV proton irradiation
- 제목
- Formation of electrically active defects in Cz and Fz silicon wafers by 3 MeV proton irradiation
- 저자
- Huh, Joo Youl
- 학회명
- Materials Research Society
- 개최국가
- 미국
- 학회 개최일
- 2000-11-27 ~ 2000-12-01