Post annealing effect on electrical characteristics and contact resistance of a-IGZO TFTs with SiO2 gate dielecric on sillcon substrates

제목
Post annealing effect on electrical characteristics and contact resistance of a-IGZO TFTs with SiO2 gate dielecric on sillcon substrates
저자
Ju, Byeongkwon
학회명
ICMAP2009
개최국가
대한민국
학회 개최일
2009-09-20 ~ 2009-09-25