Influence of temperature of AlN buffer layer deposition on crystallinity of GaN

Influence of temperature of AlN buffer layer deposition on crystallinity of GaN
제목
Influence of temperature of AlN buffer layer deposition on crystallinity of GaN
제목 (타언어)
Influence of temperature of AlN buffer layer deposition on crystallinity of GaN
저자
BYUN, Dong Jin
발행일
2014-12-08
학회명
The 17th International Symposium on the Physics of Semiconductors and Applications
개최국가
대한민국
학회 개최일
2014-12-07 ~ 2014-12-11