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A low Temperature direct bonding method using an electron-beam evaporated silicon-oxide interlayer

  • PARK, JUNG HO
제목
A low Temperature direct bonding method using an electron-beam evaporated silicon-oxide interlayer
저자
PARK, JUNG HO
학회명
Materials Research Society Symposium
개최지
Materials Research Society Symposium
학회 개최일
1996-01-01

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