Nano-imprint lithography of 100nm sized patterns using water soluble PVA(poly-vinyl alcohol) stamp

제목
Nano-imprint lithography of 100nm sized patterns using water soluble PVA(poly-vinyl alcohol) stamp
저자
Lee, Heon
학회명
2005 Chaina NANO
개최지
Beijing
학회 개최일
2005-06-09 ~ 2005-06-11