Metal patterning process on rigid and flexible substrates using nanoimprint lithography and resist pattern transfer technique

제목
Metal patterning process on rigid and flexible substrates using nanoimprint lithography and resist pattern transfer technique
저자
Lee, Heon
학회명
MPA 2008 (The International Meeting on Developments in Materials, Processes and Applications of Nanotechnology)
개최국가
영국
학회 개최일
2008-01-06 ~ 2008-01-08