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Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5

  • Shin Hyun Joon
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Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5
저자
Shin Hyun Joon
발행일
2003-10-01
학회명
KANG's Fin

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