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Selective Dry Etching of SrBi2Ta2O9/CeO2 in the High Density Inductively Coupled Plasma Reactive Ion Etching

  • PARK, JUNG HO
제목
Selective Dry Etching of SrBi2Ta2O9/CeO2 in the High Density Inductively Coupled Plasma Reactive Ion Etching
저자
PARK, JUNG HO
학회명
AVS50, 2003
개최지
Baltimore, Maryland
학회 개최일
2003-11-02 ~ 2003-11-07

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