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Thermal stabilites of PECVD W-B-N thin films as a diffusion barrier

  • Kim Yong Tae
제목
Thermal stabilites of PECVD W-B-N thin films as a diffusion barrier
저자
Kim Yong Tae
발행일
1997-07-01
학회명
Microelectronic Manufacturing(SPIE-The International Society of Optical Eng. Austin Texas, 1-2 Oct.1997) Proc. of SPIE

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