Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI(Mirror Reflected Parallel Beam Illuminator)System with an Ultra-slow-Rotated and Inclined X-Y-Z Stage
Moon Sung Wook
제목
Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI(Mirror Reflected Parallel Beam Illuminator)System with an Ultra-slow-Rotated and Inclined X-Y-Z Stage