상세 보기
Neural Network Modeling of Deposition Rate Characteristics of Low Temperature Silicon Nitride Deposited by Inner Two Parallel Coil Inductively Coupled Plasma Chemical Vapor Deposition
- 제목
- Neural Network Modeling of Deposition Rate Characteristics of Low Temperature Silicon Nitride Deposited by Inner Two Parallel Coil Inductively Coupled Plasma Chemical Vapor Deposition
- 저자
- PARK KANG-BAK
- 발행일
- 2012-08-16
- 학회명
- The 10th NANO KOREA 2012 Symposium
- 개최국가
- 대한민국
- 학회 개최일
- 2012-08-16 ~ 2012-08-18