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Fabrication and Wafer-Level Packaging of Si Electrostatic Microgripper for Micro Assembly

  • Pak, James Jungho
제목
Fabrication and Wafer-Level Packaging of Si Electrostatic Microgripper for Micro Assembly
저자
Pak, James Jungho
학회명
The 13th International Conference on Solid-States Sensors, Actuators and Mirosystems
학회 개최일
2005-06-05 ~ 2005-06-09

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