Effect of N2O on Annealed and Un-Annealed Al2O3 Films Prepared by Plasma Assisted Atomic Layer Deposition

  • Donghwan KIM
제목
Effect of N2O on Annealed and Un-Annealed Al2O3 Films Prepared by Plasma Assisted Atomic Layer Deposition
저자
Donghwan KIM
학회명
21st International Photovoltaic Science and Engineering Conference & exhibition
개최국가
일본
학회 개최일
2011-11-28 ~ 2011-12-02