Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors

제목
Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors
저자
KWON, Oh Myoung
발행일
2008-01-07
학회명
2008 ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
개최지
타이난, 대만
개최국가
대만
학회 개최일
2008-01-06 ~ 2008-01-09