ScholarWorks@고려대학교

상세 보기

Effect of slurries on the dishing of Shallow Trench Isolation structure during CMP process

  • Lim, Dae-Soon
제목
Effect of slurries on the dishing of Shallow Trench Isolation structure during CMP process
저자
Lim, Dae-Soon
학회명
The 2nd ASIATRIB International Conference

ScholarWorks@고려대학교

02841 서울특별시 성북구 안암로 145 Tel. 02-3290-2963

COPYRIGHT © 고려대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.