Effects of chemical bondings on hydrogen passivation properties of PECVD SiNx in silicon solar cells

Effects of chemical bondings on hydrogen passivation properties of PECVD SiNx in silicon solar cells
제목
Effects of chemical bondings on hydrogen passivation properties of PECVD SiNx in silicon solar cells
제목 (타언어)
Effects of chemical bondings on hydrogen passivation properties of PECVD SiNx in silicon solar cells
저자
Kang Yoon Mook
발행일
2017-02-16
학회명
제52회 한국진공학회
개최국가
대한민국
학회 개최일
2017-02-15 ~ 2017-02-17