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Microstructure and steress evolution of boron nitride thin films with varying the substrate bias

  • CHOI, In-Hoon
제목
Microstructure and steress evolution of boron nitride thin films with varying the substrate bias
저자
CHOI, In-Hoon
학회명
Materials Research Society of Korea P-25
개최지
Materials Research Society of Korea P-25
학회 개최일
2001-01-01

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