Construction of CPW Pogo Pin Probes for RFIC Measurements

초록

A new radio frequency (RF) probe using pogo pin tips for integrated chip (IC) measurement up to 50 GHz is proposed. It offers high durability due to the pogo pins and meets three key design criteria for general IC measurement: (1) a 45 degrees tilted shape with a 70 mu m tip protrusion for easy microscope inspection, (2) linear pogo pin alignment for commercial chip pad contact, and (3) a 250 mu m pitch compatible with standard IC pad pitches. This design is distinct from traditional pogo pin probe cards which place pogo pins in vertical form, in a diagonal arrangement, and at wide intervals. The probe exhibits a low insertion loss of 1.6 dB at 45 GHz. A printed circuit board (PCB)-based calibration standard for the calibration of the designed probe is constructed, which is adjusted to inductance and capacitance values using a simulation to form the Vector Network Analyzer (VNA) calibration set. The measurements of a commercial amplifier IC using this probe show a nearly identical performance to commercial RF probes, confirming its accuracy and reliability.

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