Nano-Floating Gate Memory Devices Composed of ZnO Thin-Film Transistors on Flexible Plastics

  • Park, Byoungjun
  • Cho, Kyoungah
  • Kim, Sungsu
  • Kim, Sangsig
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초록

Nano-floating gate memory devices were fabricated on a flexible plastic substrate by a low-temperature fabrication process. The memory characteristics of ZnO-based thin-film transistors with Al nanoparticles embedded in the gate oxides were investigated in this study. Their electron mobility was found to be 0.18 cm(2)/V.s and their on/off ratio was in the range of 10(4)-10(5). The threshold voltages of the programmed and erased states were negligibly changed up to 10(3) cycles. The flexibility, memory properties, and low-temperature fabrication of the nano-floating gate memory devices described herein suggest that they have potential applications for future flexible integrated electronics.

키워드

Flexible devicesLow temperatureNanoparticlesNon-volatile memoryThin-film transistorsTRANSPARENT OXIDE
제목
Nano-Floating Gate Memory Devices Composed of ZnO Thin-Film Transistors on Flexible Plastics
저자
Park, ByoungjunCho, KyoungahKim, SungsuKim, Sangsig
DOI
10.1007/s11671-010-9789-5
발행일
2011
유형
Article
저널명
Nanoscale Research Letters
6