Metal patterning process in flexible PET flim using nanoimprint lithography and resist pattern transfer technique

제목
Metal patterning process in flexible PET flim using nanoimprint lithography and resist pattern transfer technique
저자
Lee, Heon
학회명
MRS spring meeting 2008
개최국가
미국
학회 개최일
2008-03-24 ~ 2008-03-28